发明名称 |
METHOD FOR DETERMINING CONCENTRATION OF ORGANIC ADDITIVE IN COPPER ELECTROPLATING BATH |
摘要 |
The concentration of an organic additive in a plating bath is determined by providing a polished and constant current density preplated rotating disc cathode, a reference electrode and anode in an electrolytic copper plating bath, passing an electric current from the anode to the cathode and reference electrode; measuring the voltage difference between the cathode and reference electrode; and comparing the difference to values for known concentrations of the organic additive. |
申请公布号 |
JPS59137853(A) |
申请公布日期 |
1984.08.08 |
申请号 |
JP19830180859 |
申请日期 |
1983.09.30 |
申请人 |
INTERN BUSINESS MACHINES CORP |
发明人 |
PAAMINDAA ESU BINDORA;ARAN PII DEEBITSUDO;REIMONDO TEI GIYARASUKO;DEEBITSUDO ENU RAITO |
分类号 |
G01N27/416 |
主分类号 |
G01N27/416 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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