CORPUSCULAR IRRADIATION OF TARGET,申请号GB19840016828-传众专利搜索

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发明名称	CORPUSCULAR IRRADIATION OF TARGET
摘要
申请公布号	GB8416828(D0)	申请公布日期	1984.08.08
申请号	GB19840016828	申请日期	1984.07.02
申请人	ZEISS JENA VEB, CARL	发明人
分类号	G03F1/00;G03F1/08;H01J37/30;H01J37/317;H01L21/027;(IPC1-7):H01J37/30	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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