| 摘要 |
In the microscope, a deflection lens (D) scans are electron beam (B) at a predetermined speed, and a secondary electron detector(1) detects information found during the scanning. The amplifier (2) generates a signal that gives focus correction accuracy to the detecting signal of the detector (1). The devices (3, 4, 5, 6, 7, 8, 9, 10, 11, 12) (15, 16, 17, 18, 19, 20, 21, 22, 22, 23, 24) measure variations in the respense time to the detecting signal from the first level (L1) to the second level(L2).
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