| 摘要 |
PURPOSE:To stabilize the recognition of a pattern on a bonding, and to improve the efficiency of bonding work by forming a non-glossy irregular layer to a metallic foil on the surface of a finger through etching. CONSTITUTION:A non-glossy irregular layer is formed to a metallic foil through etching before the surface of the metallic foil on the side reverse to the surface bonded with an insulating film is plated. For example, a copper foil 1 is laminated on a polyimide film 2 to which IC device holes are bored, the surface and back of the copper foil 1 are polished chemically and smoothed, the IC device holes are coated with an etching resist, the whole is dipped in a 3% ammonium persulfuric acid solution, and the fine non-glossy irregular layer 4 of 1mum size and 1mum roughness is formed only to the surface of the copper foil. A large number of fingers are formed through etching, nickel foundation-plated, and then gold plated 3. The shapes of the fingers can be recognized distinctly because of sufficient diffused reflection light striking a TV camera for the recognition of a pattern. |
