| 摘要 |
PURPOSE:To obtain the titled apparatus for forming a photosensitive film of excellent quality, by providing a means for forming a high-frequency electric field between a mesh electrode to be arranged at the periphery of an electric conductive drum inside a reaction chamber and an outer electrode arranged apart from the former electrode. CONSTITUTION:In the capacity-coupling apparatus for glow discharge decomposition, an electric conductive drum 23 insertedly mounted on a drum-supporting stand 25 is rotationally driven inside a reaction chamber 21. A couple of plate electrodes 26, 27 are provided parallelly with each other at both sides of said electric conductive drum 23, and an electric conductive mesh cylindrical electrode 32 is provided in a state surrounding the electric conductive drum 23. By impressing high-frequency power between both of the plate electrodes 26, 27 from a high-frequency power source 31, glow discharge is formed between the plate electrodes 26, 27 and the mesh electrode 32 to decompose formed gas. Hereon, activated seeds adhere through the mesh electrode 32 onto the electric conductive drum 23 being rotated, while most of ions and electrons are captured by the mesh electrode 32. Hence, a uniform perfect film such as an a-Si photosensitive layer can be formed at a high speed. |
