| 摘要 |
PURPOSE:To improve the wear resistance and to reduce the output reduction in a high frequency region by laminating plural thin films of an amorphous magnetic Co-Zr alloy with a nonmetallic intermediate layer having specified Vickers hardness in-between. CONSTITUTION:Plural thin films of an amorphous magnetic alloy represented by a formula TxXy are laminated with a nonmagnetic intermediate layer in- between. The Vickers hardness Hv (100g DPH load) of the material forming the intermediate layer is 400-2,000kg/mm.<2>. In case of >2,000kg/mm.<2> hardness Hv, the edge planeness of the thin films on a face to be butted is deteriorated, and the output is reduced in a high frequency region. In case of <400kgmm.<2>hardness Hv, the wear resistance is deteriorated, and the output reduction in the high- frequency region is increased. In the formula, T is Co or a combination of Co with one or more kinds of transition metallic elements others than Co and Zr, X is Zr or a combination of Zr with one or more kinds of other vitrifying elements, x+y=100atom%, and y is 5-35atom%. |
