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经营范围
发明名称
OPTICAL LITHOGRAPHIC PROCESSES
摘要
申请公布号
GB8416345(D0)
申请公布日期
1984.08.01
申请号
GB19840016345
申请日期
1984.06.27
申请人
GENERAL ELECTRIC CO
发明人
分类号
G03F7/09;H01L21/027;(IPC1-7):H01L21/88
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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