| 摘要 |
PURPOSE:To obtain a miniature pedestal for crystal oscillator having high processing accuracy and high shock resistance by bonding plural pedestals produced from a crystal plate by a photoetching process by means of a cementing material. CONSTITUTION:Both Cr and Au are sputtered on both sides of a crystal plate Q of 0.1-0.15mm., and a resist is coated on both sides of the plate Q. Then the exposure and development are carried out with a light shielding mask in the areas of a recess part of a pedestal, a part to be etched to form an external from and the part where an external form is produced on the back side. In the drawing, A is Au, C is Cr and R represents resist respectively. Then Au and Cr on the upper side are etched after deleting the resist R, and therefore the recess part and the external form on the upper side are etched. Then the resist is deleted to finish the manufacturing process of a pedestal for crystal oscillator. |
