| 摘要 |
PURPOSE:To reduce dispersion in characteristics and to enhance durability and reliability, by forming a thin metal film constituting strain resistance gage on the surface of an inorganic insulating thin film, which is formed on the surface of a metal diaphragm by a vacuum thin film forming method, by using also a vacuum thin film forming method. CONSTITUTION:A base 11 of a diaphragm 10 is a disk constituted by phosphor bronze having large tensile strength. An insulating layer 12 comprising SiO2 is sputtered on both surfaces of the base 11. An amorphous alloy layer 13 is sputtered on the insulating layer 12 to the thickness of 5,000Angstrom . The amorphous alloy layer 13 is formed into a pattern, which constitutes a resistance strain gage by photoetching and the like. In this constitution, dispersion in characteristics can be reduced, and durability and reliability can be enhanced. |
