发明名称 DIRECTIONAL VACUUM GAUGE
摘要 PURPOSE:To obtain a high performance apparatus utilizing an excited neutral particle by collimating the particle with two sheets of slits to measure the flying time and the strength. CONSTITUTION:An electron gun 10 as exciting device is controlled with an electron gun controlling circuit 11 and generates a pulse electron beam 12 with the pulse width of about 1-100musec. The electron beam 12 is made to impinge on gas molecules as shown by the arrow 14 through an electron beam deflection electrode 13 to generate an excited neutral particle, an ion and a photon from the gas molecules 14. The ion is reflected with a blocking electrode 19 so as to be blocked from entering a secondary electron multiplier 18. On the other hand, the excited neutral particle and the photon reach the secondary electron multiplier 18 through a slit 16, a blocking electrode 19 and a slit 17 but is separable hourly. After amplified 20, an output of the secondary electron multiplier 18 is fed to single channel analyzer 21. The output thereof is connected to a waveform memory 22 on one hand to a counter 23 on the other, which is gated through a gate signal circuit 25.
申请公布号 JPS59132355(A) 申请公布日期 1984.07.30
申请号 JP19830005292 申请日期 1983.01.18
申请人 NIPPON SHINKU GIJUTSU KK 发明人 TSUJI YASUSHI;ARAKAWA ICHIROU
分类号 H01J49/40;G01M3/20;G01N27/62;G01N27/64;G01N27/68;G01T3/00 主分类号 H01J49/40
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