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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
摘要
申请公布号
SG57283(G)
申请公布日期
1984.07.27
申请号
SG19830000572
申请日期
1983.09.07
申请人
EASTMAN KODAK COMPANY
发明人
分类号
C23C14/06;C23C14/14;C23C14/58;H01L21/20;H01L21/203;H01L21/28;H01L21/3215;H01L29/04;H01L31/02;(IPC1-7):C23C13/04;H01L21/285
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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