发明名称 PELLET MOUNT DEVICE
摘要 PURPOSE:To improve accuracy of pellet mount by improving adhesive strength of the pellet and a base material without generating cracks or cutouts by providing the loading mechanism which minimize the load applied to the pellet when the pellet makes contact with the base material and applys a desired load to the pellet when scrubbing. CONSTITUTION:When a contact roller 18 is touched to a nail-shaped projection 16a of a cam 16 for increasing the load gradually, a T-shaped lever 17 and a crank arm 19 are located in parallel to a supporting bar 1 and a swing arm 2 is also parallel to them at this time. When a collet 3 completely lowers, the load is 10-40g, for example. When the contact roller 18 is detached from the projection 16a of the cam 16, the T-shaped lever 17 falls down and a front end of the crank arm 16 turns upward to pull up a tension spring 22 thereby raising a rear end 2b of the swing arm 2 thereby lowering the collet 3. The collet 3 is applied with the load, for example, becoming 40-200g.
申请公布号 JPS59130432(A) 申请公布日期 1984.07.27
申请号 JP19830231319 申请日期 1983.12.09
申请人 HITACHI SEISAKUSHO KK 发明人 IKEDA YUUJI
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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