| 摘要 |
PURPOSE:To obtain a photosensitive resist laminate having a circuit of an electrically conductive transparent film and suitable for a display element by laminating a photosensitive resist layer on a polymer film having an electrically conductive transparent film, coating the resist layer of the resulting photosensitive resist laminate with a protective film and carrying out development with an aqueous alkali soln. CONSTITUTION:Gold, silver, copper, ITO or the like is deposited on the surface of a polymer film to form an electrically conductive transparent film, a resist soln. is applied to the polymer film and dried. and a film of polyethylene glycol terephthalate or the like is laminated to obtain a photosensitive resist laminate. A mask is brought into contact with the resist laminate under reduced pressure, exposure and development with an aqueous alkali soln. are carried out, the electrically conductive film of ITO or the like is etched with hydrochloric acid as an etchant, and the remaining resist is removed with an aqueous sodium hydroxide soln. to obtain an electrically conductive pattern. |
