发明名称 |
Process for producing silicon devices |
摘要 |
Dielectrically isolated regions of single crystal silicon are produced through the use of a specific melting process. In this process, a substrate having regions of single crystal silicon contacting regions of non-single crystal silicon that overlie a dielectric material are treated. In particular, the entire region(s) of non-single crystal silicon is melted utilizing primarily radiant energy. Cooling is then initiated and the molten silicon is converted into a region of single crystal material. Isolation is completed by removing the appropriate regions of single crystal silicon.
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申请公布号 |
US4461670(A) |
申请公布日期 |
1984.07.24 |
申请号 |
US19820374309 |
申请日期 |
1982.05.03 |
申请人 |
AT&T BELL LABORATORIES |
发明人 |
CELLER, GEORGE K.;LISCHNER, DAVID J.;ROBINSON, MCDONALD |
分类号 |
H01L21/20;H01L21/268;H01L21/762;(IPC1-7):C30B1/08 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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