发明名称 Process for producing silicon devices
摘要 Dielectrically isolated regions of single crystal silicon are produced through the use of a specific melting process. In this process, a substrate having regions of single crystal silicon contacting regions of non-single crystal silicon that overlie a dielectric material are treated. In particular, the entire region(s) of non-single crystal silicon is melted utilizing primarily radiant energy. Cooling is then initiated and the molten silicon is converted into a region of single crystal material. Isolation is completed by removing the appropriate regions of single crystal silicon.
申请公布号 US4461670(A) 申请公布日期 1984.07.24
申请号 US19820374309 申请日期 1982.05.03
申请人 AT&T BELL LABORATORIES 发明人 CELLER, GEORGE K.;LISCHNER, DAVID J.;ROBINSON, MCDONALD
分类号 H01L21/20;H01L21/268;H01L21/762;(IPC1-7):C30B1/08 主分类号 H01L21/20
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