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发明名称
摘要
申请公布号	JPS59109907(U)	申请公布日期	1984.07.24
申请号	JP19830004122U	申请日期	1983.01.13
申请人		发明人
分类号	G01C9/06;G01B7/00;G01B7/30;H01L43/04;H01L43/06;(IPC1-7):G01C9/06	主分类号	G01C9/06
代理机构		代理人
主权项
地址

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