| 摘要 |
PURPOSE:To uniformly form a vacuum evaporated conductive film on the tube inside wall at a low cost, by positioning a long and slender boat-shaped heater made of tantalum or molybdenum and containing the required metal powder, in the axial direction of a rotary tube to be subjected to vacuum evaporation. CONSTITUTION:A long and slender, besides, partly opened boat 7 made of tantalum or molybdenum and containing, for instance, chrome powder 8 uniformly in average is horizontally placed in a vacuum device 3 while being inserted into the center part of a rotary outer tube 2 and set conductively, further being provided with a crystal oscillator 5' which is an accessory of a film thickness meter 5 near the one end thereof thus enabling the film thickness to be controlled. And when reaching a high vacuum, the boat 7 is electrically heated to evaporate chrome 8 and form a vacuum evaporated film 6 having the desired thickness on the inside wall of the tube 2. |
