| 摘要 |
PURPOSE:To improve the durability of the titled device by a method wherein the fluctuation of pressure generating from the shifting of an alignment scope is obserbed by an auxiliary chamber and a shifting member. CONSTITUTION:When the alignment scope 9 is advanced to the point located above a mask 6 and a wafer 7, the third valve 22 is opened. Thereupon, the alignment scope 9 advances, and a float 23 is shifted to the right-hand direction in a cylinder 20 in the amount of reduction of the volume of an X-ray lead-out chamber 5. As a result, the abnormal increase of the internal pressure of the X- ray lead-out chamber 5 for the outside air pressure can be prevented, thereby enabling to prevent the damage and deformation of the second X-ray lead-out window 8. |
