发明名称 TARGET SETTING DEVICE
摘要 PURPOSE:To obtain a target setting device which sets a target at a reference position with high precision after catching a minute target as a picture through a TV camera, etc. and obtaining the correlation between said picture and a basic picture to detect the position of the maximum correlation value. CONSTITUTION:A picture whose target is set accurately at the center of a reticle is stored in a memory 6, and a reticle piclture 3 including the present target 2 is obtained by a target monitor device 4 such as a TV camera, etc. and then supplied to a memory 5. The correlation function between memories 5 and 6 is obtained from a prescribed arithmetic equation. Then the maximum correlation value is detected by making use of a fact that the position of the maximum value is coincident with the deviation of the target position. Then the coordinates of the maximum value is obtained, and a target driving device is driven with the obtained coordinates used as the deviation information. Thus the target 2 is set at the center of the reticle.
申请公布号 JPS59127104(A) 申请公布日期 1984.07.21
申请号 JP19830002689 申请日期 1983.01.11
申请人 NIPPON DENKI KK 发明人 YAMAMOTO JIYUN
分类号 H01L21/30;G05B11/00;G05B11/01;G06T1/00;H01L21/027;H04N7/18 主分类号 H01L21/30
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