发明名称 FORMATION OF SPHERICAL PART FOR JOINING ALUMINUM BONDING WIRE
摘要 PURPOSE:To form a spherical part without deformation and eccentricity by conducting an Al fine wire in inert gas and fusing it by resistance heat generation. CONSTITUTION:The Al fine wire 2 is led out of a capillary chip 1 and bonded by stitch to a lead finger 7 provided in the state of opposition immediately under the chip 1. Next, conduction electrodes 10 are pressed on fixed positions of the Al fine wire, and conduction is performed from a DC power source 8 of 2-3kV to the Al fine wire 2. Then, the Al fine wire 2 is fused by resistance heat generation, and the spherical part 3 is formed by surface tension. At this time, the conduction part of the Al fine wire 2 is positioned in the inert gas atmosphere A in order to prevent the formation of an oxide film. This method produces no deformation and eccentricity of the spherical part because of no affectedness of arc reaction force, unlike the formation of the spherical part caused by discharge.
申请公布号 JPS59126646(A) 申请公布日期 1984.07.21
申请号 JP19830002068 申请日期 1983.01.08
申请人 MITSUBISHI DENKI KK 发明人 HIROTA SANEYASU;MACHIDA KAZUMICHI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址