| 摘要 |
PURPOSE:To obtain the desired laser output by operating only a vacuum pump at the starting time, forming a low velocity laser gas flow state, applying a voltage to each discharge tube to discharge the all tubes, then operating a blower pump to set high speed gas flow state, thereby hardly discharging one side. CONSTITUTION:When a laser is started, gas is supplied from a gas supply unit 15, and gases are flowed in parallel by a rotary pump 14 at a low speed to four discharge tubes 1, 2, 3, 4. In this case, a valve 35 is closed, and a valve 16 is opened. In case of this low speed flow, the flow rate of the gas flowed to the four tubes tend to become uniform, and the discharge starting voltages of the four tubes are equalized. Then, when voltages are respectively applied between the anode 22 and the cathode 26 of the tube 1, between the anode 23 and the cathode 27 of the tube 2, between the anode 24 and the cathode 28 of the tube 3 and between the anode 25 and the cathode 29 of the tube 4 from the wire 18 in the low speed gas flow state, the all tubes 1-4 simultaneously discharge. After these all tubes discharge, the valve 35 is opened, and the valve 16 is closed. Then, the gas flows in the tubes at high speed to obtain the desired laser output. |
