| 摘要 |
PURPOSE:To improve the yield and the quality of a photoconductive element array by forming a conductor film on an insulating substrate which includes both side end faces of a photoconductive film and providing a leading electrode film on the substrate which includes both side ends of the conductor film, thereby preventing the exfoliation of the electrode film. CONSTITUTION:A CdSexS1-x film (photoconductive film) 12 is covered by a depositing method or a sputtering method on an insulating substrate 11, formed in a strip by a lifting-off method or etching method, and heat treated in nitrogen atmosphere to be activated (photoconducted). A CdSeyS1-y film (conductor film) 13 is covered on the side faces of the film 12 and on the substrate 11 by a lifting-off method. Leading electrode film 14 is formed by a lifting-off method, and etched to be isolated into a slender element. Since most of the leading film 14 is bonded to the substrate 11 to improve the bondability, a defect of exfoliating the electrode film in case of inspecting and trimming can be eliminated. |
