| 摘要 |
A hydrostatic pressure XY table comprising first and second sliding tables mounted on a bed. The two sliding tables are driven perpendicularly to each other by separate motors through a first lead screw supported on the bed and a second lead screw supported on the first sliding table. The bed has a first trapezoidal groove and the first sliding table has a second trapezoidal groove running perpendicular to the first trapezoidal groove. The first sliding table is engaged with the first trapezoidal groove and the second sliding table is engaged with the second trapezoidal groove. Four hydrostatic pressure guides are provided in the bed, to engage with engaging surfaces of the first sliding table. Four hydrostatic pressure guides are also provided in the first sliding table to engage with engaging surfaces of the second sliding table. A plurality of fluid pressure lines are provided for supplying hydrostatic pressure to the engaging surfaces of the first and second sliding tables. A hydrostatic pressure feed mechanism consisting of a lead screw, a nut and a fluid pressure line for supplying hydrostatic pressure through the nut to opposite screw faces of the lead screw is provided for each sliding table. By use of the hydrostatic pressure XY table it is possible to carry out machining operations in which close dimensional tolerances must be observed as in the grinding of magnetic disk heads and the grinding and polishing of plastic shaping dies. |
