| 摘要 |
PURPOSE:To straighten easily and rapidly a magnetic recording medium without deteriorating the magnetic characteristics by forming a ferromagnetic metallic thin film on a polymer film substrate and by carrying out plasma heat treatment for a short time without taking the substrate out of a vacuum vessel to cause uniform thermal shrinkage. CONSTITUTION:A film substrate 8 of polyester, polyimide or the like is sent from a vacuum vessel 1 to a vacuum vessel 2 by transfer from a feeding roll 9 to a winding roll 14 along cylindrical cans 3, 6. In the vessel 1, a Co-Ni alloy 15 is vacuum-deposited on the substrate 8, and in the vessel 2, plasma heat treatment is carried out for 0.1-10sec in an atmosphere of gaseous Ar, He, Ne, N2 or O2 with an AC power source 18. Thus, curl produced during the vacuum deposition is eliminated or minimized without deteriorating the magnetic characteristics. |
