| 摘要 |
PURPOSE:To carry out positioning control with high accuracy, by using a laser means to detect the x-direction displacement of a table carrying a tool rest, due to the error in the squareness of a guide or the like, to control a voltage impressed upon piezoelectric elements supporting a tool holder. CONSTITUTION:When a table 2 is displaced by DELTAx toward a reference mirror 26 due to the error in the squareness of a guide 1 or the inaccuracy of a drive system as the table is slid, laser light f2 generated by a laser oscillator 28 and transmitted to a receiver 27 through a polarized beam slitter 25, a cube corner 21, etc. undergoes a Doppler frequency modulation by the displacement DELTAx. The output of the receiver 27 is processed by a counter 29 to apply a displacement signal to a controller 30. The controller then supplies a controlled voltage to piezoelectric elements 8, 9 pinch-holding the flange of a tool holder 6, to move a tool 7 by DELTAx toward a workpiece 10. The position of the tool 7 is thus corrected. |
