| 摘要 |
PURPOSE:To make precision positioning possible by controlling a table position by making use of both output signals from a position detector installed on the side of a driving device for moving a table on a base plate and a position detector installed on the table side. CONSTITUTION:A motor rotor part 42 constituting a motor part and a tachogenerator rotor part 43 constituting a position detector are provided on one end of a ball screw 44 to which a ceiling plate (table) 54 is coupled via a nut part 53, and the other end of the ball screw 44 is supported on base plate 45 via a bearing 47. V-shaped sensor blocks 48, 49 are fixed on the base plate 45, and therewith guide blocks 56, 57 provided on the ceiling plate 54 are engaged to permit their sliding to be guided. Further, a scale 72 for forming interference fringes is attached on the side surface of the ceiling plate 54, and an optical sensor 74 for reading said interference fringes is fixed on the base plate 45, allowing position control for the ceiling plate 54 to be performed in response to outputs from the aforementioned both detecting means 43, 74. |
