| 摘要 |
PURPOSE:To detect the position of trouble easily on the analysis of trouble by arranging patterns as marks in one direction or two directions so that a specific position in a semiconductor integrated circuit is detected easily. CONSTITUTION:In the manufacturing process of a memory array, the patterns 2 as the marks are put on one parts of the memory cell array 3 except patterns constituting an element. When a trouble address in a trouble memory is specified, an address in any number from the end of the memory array can be specified by observing the marks without counting an actual address line one by one from the end of the memory array. |
