| 发明名称 |
LARGE SCALA INTEGRATION SEMICONDUCTOR DEVICE HAVING MONITOR ELEMENT AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
In an LSI semiconductor device, a monitor element comprising a wiring layer for monitoring the wiring formation on the semiconductor substrate and monitor terminal portions formed on both ends of the wiring layer is formed in the dead area of the semiconductor substrate. |
| 申请公布号 |
EP0073721(A3) |
申请公布日期 |
1984.07.18 |
| 申请号 |
EP19820401588 |
申请日期 |
1982.08.26 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
TANIZAWA, TETSU;OMICHI, HITOSHI;MITONO, YOSHIHARU |
| 分类号 |
H01L21/822;H01L21/66;H01L23/522;H01L23/544;H01L27/04;(IPC1-7):01L21/66;01L27/02 |
主分类号 |
H01L21/822 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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