Rotating liquid nitrogen cooled substrate holder

摘要

An apparatus comprising a rotating substrate holder is provided. The rotating substrate holder is hollow and adapted to receive liquid gas such as nitrogen to cool the substrate to cryogenic temperatures. The novel substrate holder is supported inside of a vacuum chamber by a thin wall tube which is sealed with a liquid rotating seal at the point where it passes completely through the top wall of the vacuum chamber. The novel thin wall tube support provides access to the hollow substrate holder from outside the vacuum chamber and provides temperature isolation of the liquid in the substrate holder so that the liquid rotating seals are maintained at operable elevated temperatures.