| 摘要 |
PURPOSE:To check patterns in a short time by picking up an image of an area of a pattern to be checked corresponding to pattern data stored in a video memory every time a sample is fed intermittently and collating the pattern data with data read out of the video memory. CONSTITUTION:An image of the pattern to be checked on a photomask M mounted on the XY stage of a pattern checking device is picked up by an image sensor IS and applied to a monitor TVMON3 and a comparison part CMP. This photomask M is fed intermittently at desired pitch under the control of a control part CNT and pattern data on an optional area of the pattern to be checked is stored in the video memory VM through a tape deck DEC and a switching part SW. Then, an image of an area of the pattern to be checked corresponding to the pattern data stored in the memory VM is picked up every time the mask M is fed intermittently and then compared by a comparator CMP with the pattern data in the memory VM while synchronized by an A/D converter ADC and the switching part SW to check the pattern data. |
