发明名称 SAMPLE-MOVING DEVICE IN ELECTRON RAY SYSTEM
摘要 PURPOSE:To facilitate the polar-coordinate-type movement of a sample by driving with motors both a rotary mechanism used to rotate the sample and a linearly moving mechanism used to move the rotation center along a linear line, and controlling the motors through a means for movement in the XY perpendicular coordinate system. CONSTITUTION:A rotary mechanisms 3 on which a sample 1 is placed and a linearly moving mechanism 4 used to move the center of the rotation of the mechanisms 3 in the direction of linear line (R) are installed in a sample chamber 2. The mechanisms 3 and 4 are driven with stepping motors 5 and 6 attached to the side wall of the sample chamber 2. The motors 5 and 6 are controlled by a control signal from a motor-driving circuit 7. An output from a sample-moving means 8 is used as the input to the circuit 7 after being converted in a central controlling circuit 9. The means 8 is provided with switches 10-13 used in designating the direction of movement in the XY coordinate system, switches 14 and 15 respectively used in changing R coordinates and theta coordinates of the polar coordinate system and a switch 16 used in switching between the polar and the XY coordinate systems. By the means mentioned above, polarcoordinate- type movement can be performed in the same manner as the XY coordinate system.
申请公布号 JPS59123149(A) 申请公布日期 1984.07.16
申请号 JP19820234190 申请日期 1982.12.28
申请人 NIPPON DENSHI KK 发明人 OBARA KENJI
分类号 H01J37/20;H01L21/027 主分类号 H01J37/20
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