| 摘要 |
PURPOSE:To enhance color developing sensitivity in the range of an electrochromic (EC) display element and to greatly extend its life by preparing the EC substance layer of a binary metallic oxide contg. Zr and W. CONSTITUTION:A transparent electrode 2, a Cr2O3 film as an electrolyte, and a Ta2O5 film as an interlayer 4 are successively formed on a glass substrate 1, and then, an EC substance layer 5 made of a binary metallic oxide ZrxWyOz (x, y, z are each element proportions) contg. Zr and W is formed in about 8X 10-4atm. of a mixture of Ar and water vapor using WO3 and ZrO2 as evaporation sources by the high frequency ion plating method or the like. Next, a transparent electrode layer 6 is formed on the layer 5 to obtain an EC display element. The use of the binary EC substance layer 5 shifts light absorption spectra to the side of the visible light, enhances EC sensitivity about doubly, reduces a necessary amt. of power, and hence, extends the life of the element. |
