| 摘要 |
PURPOSE:To obtain a simple and compact mass spectrometer that is suitable for use in a nuclear fusion device by irradiating the sample of primary ions with high gas efficiency and ionizing the nuclear atoms that occupy the most part of the particles of sputtered sample surface material using a high temperature and density eletronic group and then by generating a great amount of secondary ions. CONSTITUTION:The gas that becomes primary ions, for example, argon is supplied to a vacuum container 1 through a port 2 and arrives at the hollow section 4 of an anode. A high temperature and density electron group is contained in the hollow section 4 of the anode and ionizes gas molecules. Since the ionized molecule move in the direction of the sample where it is located at a weak magnetic field by the force received from the electromagnetic field and crashes against the surface of the sample with high probability. Since the primary ions that are incident on the surface of the sample are obtained in a full amount at a low actuation, a differential exhaust system and such for the irradiation of the primary ions are not required. In addition, since an electron group for PIG discharge efficiency ionizes the nuclear atom sputtered from a sample 8, a special sensitivity measuring device need not be used. |
