| 摘要 |
PURPOSE:To treat a sheet-form material so that the treatment is uniform in the transverse direction, by surrounding the sheet-form material placed in a low- temperature plasma atmosphere with an electrically conductive grid isolated from the electrodes. CONSTITUTION:A sheet-form material 2, 2' stretched between winding shafts 6, 6, is provided between high-frequency electrodes 7, 8 provided within a reactor 1 having openings 3, 3'; air-permeable conductive grids 15, 15' are provided between the electrodes 7, 8 and the sheet-form material 2, 2' in such a position that the grids are parallel with those; and the openings 3, 3' are sealed with covers 4, 4'. A treating gas is supplied from a gas inlet 11 through a nozzle 9 and blown against the sheet-form material 2, 2' and at the same time this gas is discharged from a nozzle 10 through an exhaust port 12 so as to maintain the reactor at a vacuum of 0.1-5 Torr. At the same time, high-frequency waves generated from a high-frequency oscillator 13 are applied between the electrodes 7, 8 to generate a low-temperature plasma with which the material continuously moving between the widing shafts 6, 6' are treated. |
