发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the damage of a semiconductor chip by pasting a tape on the chip, sucking the surface of the tape and transferring and fitting the chip. CONSTITUTION:The tape 14 in which acryl group adhesives are applied on a film such as a polyimide film is pasted on the surface of the square semiconductor chip 11. When the surface of the tape is sucked by a collet 12, the tape 14 functions as a buffer material, and the damage of the chip can be prevented. It is advantageous that the size of the tape corresponds to approximately 30-80% of the area of the chip. According to the constitution, the collet needs not be exchanged in response to the chip, and the damage of the chip is prevented.
申请公布号 JPS59119737(A) 申请公布日期 1984.07.11
申请号 JP19820226608 申请日期 1982.12.27
申请人 FUJITSU KK 发明人 KUBOTA AKIHIRO;KASAI JIYUNICHI;YODA TOSHIYUKI
分类号 H01L21/52;H01L21/677;H01L23/495;(IPC1-7):01L21/58 主分类号 H01L21/52
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