| 摘要 |
PURPOSE:To reduce the variance of the mechanical Q value and the resonance frequency by forming a short slip-shaped vibrating part held between a pair of through holes at the center part of a substrate and then forming exciting electrode on both sides of said vibrating part in the form of patterns. CONSTITUTION:A pair of through holes 23 having rectangular forms when viewed from a plane are drilled opposite to each other to a piezoelectric substrate 22. A short slip-shaped vibrating part 24 is formed at the center part of the substrate 22, and exciting electrodes 25 are formed in patterns along the entire width of the part 24 at the center parts of both sides of the part 24 respectively. The terminal electrodes 26 formed at the lengthwise end parts of the substrate 22 are connected to one of both electrodes 25. Therefore the part 24 of a vibrating element 21 produces the thickness slip oscillation in the lengthwise direction of the part 24 with application of a prescribed high frequency electric field to a pair of exciting electrodes. The level of the thickness slip oscillation is maximum at the center of the part 24. |
