| 摘要 |
PURPOSE:To enable to reduce the quantity of air used by a method wherein the material to be carried is maintained in a non-contact state by a moving stopper and blowing-off air, and an air bearing carrier to be used to shift the material to be carried and a driving mechanism movable in horizontal and vertical directions are combindly used. CONSTITUTION:An air bearing carrier 11 is moved to the point close to an air bearing 11a by driving an air cylinder 14, and when stoppers 16 and 16a are pulled downward by moving a small type cylinder 17a and the left-side cylinder 17, a mask 18 is brought into the air bearing carrier 11 by the help of the air blowing off from the diagonal direction, and it is stopped by the right-side stopper 16. Then, the left-side stopper 16 is moved up, the air bearing carrier 11 is moved in the right-side direction by driving an air cylinder 14, the air cylinder 14 is stopped at the point where it reaches the point close to the air bearing 11b, and the air bearing carrier 11 is moved to the point where its upper surface reaches the same plane as the upper surface of the air bearing 11b by operating an air cylinder 15. At this point, when the right-side stoppers 16 and 16b are lowered by operating samll type air cylinders 17 and 17b, a mask 18 is moved to the point above the air bearing 11b. As a result, the quantity of air can be reduced, and the scattering of dust can also be lessened. |
