| 摘要 |
PURPOSE:To obtain a positioning device of a high speed and a high resolution by adding a simple circuit to an applied voltage controlling circuit of a piezo- effect element, in a positioning device provided with a displacement amount amplifying mechanism. CONSTITUTION:A saturation amplifier 10 and an integrator 11 are added to an applied voltage controlling circuit of a piezo-effect element. In this state, a difference signal of set voltage 12 and piezo-effect element applied voltage 15 is supplied to the saturation amplifier 10, and its output 14 is supplied to the integrator 11. In this case, if the set voltage 12 is varied in the shape of a step in order to execute positioning at a high speed, an inclined angle of the applied voltage 15 of the piezo-effect element becomes gentle by the saturation amplifier 10 and the integrator 11. Accordingly, comparing with the case when the set voltage varied in the shape of a step is applied as it is, bad influence exerted on the conversion to a high speed becomes very small. In this way, a positioning device of a high speed and a high resolution can be obtained. |
