| 摘要 |
PURPOSE:To stabilize beam acceleration voltage relatively cheap by using an automatic correction device of beam acceleration voltage in which the automatic voltage correction function is made to stop for a period of electron beam projection. CONSTITUTION:Input of a high voltage generation device 1 is connected with a variable transformer 3 of an automatic correction device 2 of beam acceleration voltage while parting beam acceleration voltage to be impressed between a cathode 5 and an anode 6 of the electron beam generation part 4 by resistance 7 as well as turning and reversing a motor 12 in comparison with an instruction signal 8 in order to control beam acceleration voltage. Further, an electromagnetic clutch 17 is provided to be projected into only for a period in which emission of an electron beam 13 is stopped in order to operate the automatic correction device 2. Accordingly, the fluctuation of line voltage is gentle when emitting beam 13 so that the voltage is stabilized during this time without control thus enabling the automatic correction device 2 to be used relatively cheap. |
