发明名称 |
Viewing and measuring apparatus |
摘要 |
An apparatus for viewing and measuring using a partially reflective grating superimposed with the object. The invention provides efficient separation of viewing and measurement spectra from a common axis for a clear view of the object in conjunction with an accurate interferometric measuring system.
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申请公布号 |
US4459026(A) |
申请公布日期 |
1984.07.10 |
申请号 |
US19820384713 |
申请日期 |
1982.06.03 |
申请人 |
CANADIAN PATENTS & DEVELOPMENT LIMITED |
发明人 |
PEKELSKY, JAMES R. |
分类号 |
G01B9/02;G01B11/00;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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