| 摘要 |
PURPOSE:To prevent short-circuiting by inserting a heat resistant insulator having a specific shape into the gap between an anode and a cathode thereby preventing sticking of a metal between the anode and the cathode. CONSTITUTION:A heat resistant insulator 17 is formed of a hollow cylindrical part 17a and a ring part 17b extending outward at one end thereof into one body. Said part 17a is inserted into the spacing between the end face of the cathode 4 of a sputtering device and the end face of its anode 6. The part 17b covers the end face 26 of the anode 6 facing the wafer disposed in the sputtering device and is so disposed that the peripheral part of the end face 26 is exposed. Short-circuiting between the anode 6 and the cathode 4 caused by the metal sticking in the spacing between the same is prevented by such sputtering device. |
