摘要 |
PURPOSE:To increase the coercive force without reducing the saturation magnetic flux density by forming needlelike Fe crystals on a substrate by a diagonal vapor deposition method and by vapor-depositing Co or a Co compound on the Fe crystals in an atmosphere contg. a very small amount of oxygen. CONSTITUTION:Needlelike Fe crystals 2 are formed on a nonmagnetic support 1 such as a polyethylene terephthalate support by a diagonal vapor deposition method. The preferred thickness of a film of the crystals 2 is about 500-3,500Angstrom . Co or a Co compound 3 is vapor-deposited on the crystals 2 in an atmosphere contg. a very small amount of oxygen. The preferred thickness of a film of the vapor-deposited Co is 100-1,500Angstrom . The Fe crystals 2 have high coercive force because of their anisotropy in shape. The vapor-deposited Co or Co compound 3 filling the gaps among the crystals 2 increases the saturation magnetic flux density. The diagonal vapor deposition of Fe is carried out at >=40 deg. angle of incidence in an atmosphere under 10<-6> Torr pressure, and the atmosphere for the vapor deposition of Co is regulated to 8X10<-3>-5X10<-5> Torr pressure. |