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发明名称
摘要
申请公布号	FR2489594(B1)	申请公布日期	1984.07.06
申请号	FR19810012685	申请日期	1981.06.26
申请人	WESTINGHOUSE ELECTRIC CORP	发明人
分类号	H01L21/322;H01L21/263;H01L29/167;H01L29/74;(IPC1-7):01L29/743;01L21/02	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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