| 摘要 |
PURPOSE:To increase a number of cartridges to be accommodated and perform continuous and stable loading and unloading of wafers for a long periode of time by arranging a plurality of cartridges on the same plane and piling such plane for several stages. CONSTITUTION:A loading/unloading apparatus which is arranged facing to the one end of a carrier 6 in the side of loader and unloader of a processing apparatus 7 for wafers 1 is composed of a turn table 4, a stage which supports cartridges 2 in two lines each at the circumference and is placed on the table 4 and an elevator 5 facing to a part of the circumference of table 4. The stage 3 accommodates the cartridges 2 of two lines and three stages, each of which is accommodating 25 wafers 1 and can move up and down facing to the cut-away part of turn table 4. Said loading/unloading apparatus delivers and accommodates the wafers through vertical transfer in pitch by pitch (ascending and descending) and rotation thereof. |
