| 摘要 |
PURPOSE:To facilitate lot management of component parts by performing transportation of the parts by the cassette unit by a method wherein a cassette vertically moving part and a parts transferring part are operated properly according to the rotational position of a turning table to enable to perform accommodation of the parts in a cassette and delivery of the parts from a cassette. CONSTITUTION:Wafers W accommodated forming in line vertically in a cassette 2A are made to come in contact with a belt 19A with the lower side thereof, and are transferred in the direction shown with an arrow mark A on a slide 17A according to the belt 19A to be transferred to the next process 22. While, at a cassette vertically moving part 7B, an elevator 11B is moved upwardly from the lowermost position of the elevator 11B by rotating a feed screw 12B according to a motor 14B and gears 15B, 13B, and at the same time, a motor 20B is driven to operate a belt 19B in the direction shown with an arrow mark B. Thereupon, wafers W transferred from the front process 23 are transferred in the direction shown with the arrow mark B on a slide 17B according to the belt 19B, and are accommodated forming in line in the vertical direction in order in a cassette 2B. Accordingly, the wafers in the cassette 2A are delivered, and the wafers are accommodated in the cassette 2B. |
