| 摘要 |
PURPOSE:To make it possible to perform highly accurate flatness measurement, by attaching indicators to a body, by which a large amount of bending moment can be taken with respect to a unit length, and supporting each indicator by cemented carbide balls at three corners. CONSTITUTION:Three or more, e.g., four dial gages 8 and 9 with a thickness of 1/1,000mm. are set to a channel steel member 7, as a base board having desirably a thickness of about 5mm., at an equal interval. The attaching height is adjusted by attaching screws 11. Each dial gage 8 is set in the direct vicinity of three cemented carbide balls (Hv=1,300) 10 with a diameter of 6mm.. The area formed by the cemented carbide balls 3 is made smaller. The indicator, which is supported by the three cemented carbide balls at three corners, is used. The measuring device is corrected on a reference flat surface plate, whose surface is machined into a highly flat plane. The height of the set measuring point, is set with respect to a temporary reference surface that is determined by arbitrary three points on the surface to be measured. The heights are sequentially obtained by utilizing the interval ratio of the positiones of the indicators. Then the flatness is measured. Each dial gage 9 indicates the displacement from the surface supported by the cemented carbide balls 9. |
