发明名称 PRODUCING A CONTROLLED UNSATURATED VAPOUR PRESSURE OF A VOLATILE LIQUID IN A HEAT TREATMENT CHAMBER
摘要 It is necessary in many heat treatment processes conducted in open systems to maintain a given partial pressure of a volatile component of a material being treated, and it is desirable to conserve this volatile component, both on account of cost and in the case of components such as mercury, toxicity. A controlled unsaturated vapor pressure of a volatile liquid 28 may be produced in a tube 3 by passing a stream of a carrier gas through a vaporizer 4 containing the liquid 28 at a temperature Ts, passing the mixture of the carrier gas and vapor of the liquid 28 through a tube 3 containing material 29 to be treated, which material 29 is at a temperature Tt. The mixture of the carrier gas and vapor of the liquid 28 is then passed to a condenser 6 from which the carrier gas is vented to waste, and the vapor of the liquid 28 is condensed at a temperature Tc in the condenser 6. Tt>Ts >Tc. The condensate passes from the condenser 6 to the vaporizer 4 through a tube 12, and the liquid 28 fills a cross-section of a length of the tube 12.
申请公布号 GB2132228(A) 申请公布日期 1984.07.04
申请号 GB19820036059 申请日期 1982.12.22
申请人 * PHILIPS ELECTRONIC AND ASSOCIATED INDUSTRIES LIMITED 发明人 JOHN CHADWICK * BRICE;COLIN RICHARD * BROUGH
分类号 H01L21/208;C23C16/448;C30B19/04;C30B19/10;H01L21/368 主分类号 H01L21/208
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