Device for measuring local electric conductivity of low-temperature plasma

摘要

A device for measuring local electric conductivity of plasma, comprising a probe, which is kinematically coupled to a drive mechanism and has a series circuit including an inductive sensor, a measuring oscillator, and a detector having one output coupled, via an optoelectronic converter, to a differential stage having a switch and a memory member. An output of the differential stage is coupled to one input of a measurement recording unit having another input coupled to a unit for feeding commands which is electrically coupled to an electropneumatic control unit accommodating air valves of drive mechanisms of the probe and calibration crystal, the air valve being coupled to pneumatic cylinders of the drive mechanisms by means of flexible bases made of an insulating material.