| 摘要 |
PURPOSE:To easily and accurately make the angle alignment without using a microscope by making the angle alignment between a stripe filter and static deflection electrode so that the specified positional relation can be obtained through a diffraction image obtained by radiation of laser beam on the filter after fixing the deflection electrode to the reference position using the aligning mark. CONSTITUTION:A thin laser beam 24 emitted from a laser generator 22 is guided to pass through a marker 42 provided opposingly at the outside of effective range of an electrostatic deflection electrode 15 through half-mirrors 4, 4 and a mirror 45. The transmitted light is received by a photo receiving element 43 and the casing holding jig 20 is rotated and fixed so that the maximum output can be obtained. The face plate 3 is irradiated with the laser beam 24 through a mirror 21, the reflected diffraction image is projected on a screen 23 and the face plate holding jig 27 is rotated so that the diffraction image on the screen is located in the specified position. Thereby, angle alignment can be realized easily and accurately, thereby drastically improving working efficiency. |
