| 摘要 |
PURPOSE:To stabilize a motor performance inexpensively and to increase the lifetime of a linear motor by providing by an ion plating method a high hardness covering unit in a guide, and moving a movable unit with the unit as a guide. CONSTITUTION:After a material which has good magnetic characteristics such as low-carbon steel or the like is annealed to remove distortions, a stator pole tooth surface 2' and a movable guide 3 are polished to form a stator 2. Then, a coating 14 of high hardness metal is formed by an ion plating method on the guide 3 at temperatures equal to or lower than the transition temperature of the material of the stator and possibly equal to the annealing temperature for removing distortions of the material of the stator 2. A movable unit is moved with the coating 14 as a guide. |
