| 摘要 |
PURPOSE:To shorten an exposure time by providing a parallel luminous flux light source which forms an irradiation circle a little larger than the short side of a long-sized plate and a photoscanning mechanism. CONSTITUTION:A mercury lamp 11, mirror 12, condenser lens 13, and collimator lens 14 are provided to constitute the parallel luminous flux source. Further, a plane mirror 15, plane mirror feed screw 16, feed motor 17, shaping diaphragm 18, mask 19, and plate 20 to be exposed are provided. Parallel luminous flux emitted by the parallel luminous flux source in parallel to the mask 19 is flexed by the plane mirror 15 at right angles to the mask 19, and has its contour shaped by the shaping diaphragm 18 and reaches the mask surface, scanning on the surface of the mask 19 by the rotation of a motor 17. In this case, the irradiation circle 22 scans on the long-sized plate 21 from a point A to a point B. Then, when a relatively short 23 is scanned, a necessary minimum scan from the position A to a position C is made. |
